Analysis on thickness measurement of pressure sens

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Analysis of the thickness measurement of pressure-sensitive adhesive tape

1 scope of application

1.1 this is the regular inspection and revision standard of the experimental machine, which is suitable for the eddy current method to measure the thickness of pressure-sensitive adhesive tape

1.2 this method is not applicable to the adhesive tape of uneven flexible metal substrate

2 definition

adhesive tape thickness refers to the adhesive thickness plus the thickness of the substrate (or including the substrate with treatment material coating on the back)

3 instrument

next generation semiconductor materials such as indium phosphide and silicon carbide

3.1 eddy current thickness gauge should meet the following requirements:

measurement accuracy: 1 μ m;

measurement error: ± 1 μ m;

reading value ± 2%

probe diameter: 5 ° ± 0.05mm

pressure per unit area: 40 ± 3kpa

4 sample

4.1 the length of the sample is about 50mm and the width is not less than 6mm

4.2 the sample shall be free of defects such as lack of glue, bubbles, impurities, wrinkles, etc. Hands or other objects should not touch the measuring area

5 sample preparation

5.1 the isolation layer should be gently removed from the sheet and double-sided adhesive tape. The outermost 3-5 layers of coiled adhesive tape shall be removed first, and then the adhesive tape shall be stripped evenly to prepare samples. The storage time shall be greater than 2 min

5.2 for the adhesive tape whose width is 100m and the extensometer should not make the sample more than m, it can be prepared after being cut at an angle of 45 ° in the length direction

6 test conditions

6.1 unless otherwise specified, the temperature of the standard laboratory is 23 ± 2 ℃; The relative humidity is 45% - 55%

6.2 the adhesive tape should be placed for more than 2H under the condition of 6.1

7 test steps

7.1 according to the instrument operating procedures, he is more willing to seek the expansion of the range for measurement under stable conditions

8 test results

8.1 the number of samples representing the same performance shall not be less than 10, and the test results shall be expressed by arithmetic mean, maximum and minimum

8.2 the test results are expressed in the following names and units:

substrate thickness, μ m;

adhesive tape thickness, μ m;

thickness of isolation layer, μ m;

adhesive thickness, μ m。

9 test report

a. adhesive tape model

b. sample sending unit, sample sending date,

c. test instrument model

d. laboratory temperature and humidity

e. average value, maximum value and minimum value of test results,

f. tester and test date

g. other contents that need to be reported

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